German First sensor inertial sensor

Tiltmeter and accelerometer

Capacitive inclinometers and accelerometers use single crystal silicon sensor elements and integrate advanced micro machining technology to achieve high noise ratio and excellent temperature stability, thus being able to detect extremely small changes in inclination or acceleration.

Thanks to the high aspect ratio microstructure (HARMS), this series of sensors has extremely low cross axis sensitivity. In addition, the highly flexible AIM (Air Gap Insulated Microstructure) technology that has already gained benefits can greatly reduce parasitic capacitance.

Evaluation board

We also offer various evaluation boards that can be used to conveniently and quickly read sensor data.