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SEM image of a band plate with a resolution of 25nmX-Ray zone plate
A high-quality X-ray optical system with validated resolution, efficiency, and reliability, low cost, suitable for soft and hard X-rays in ptychography, STXM, TXM, and phase contrast imaging.advantage
The use of different metals (gold or nickel) can improve the efficiency of a range of energies. This image is generated from the ANT band plate software.
High resolution zone plates can provide the highest resolution and efficiency over a wide range of energy. A band plate with a resolution of 18 nm (Δ r) provides high resolution and a water window efficiency of over 20%. 18nm Au FZP image, diameter 270 μ m, central aperture design.
The band plates of Applied Nanotool can be used for various applications, including large-diameter ptychography and<1 nm stitching errors of a few millimeters. Image of a waveband plate with a diameter of 0.85 millimeters
High phase contrast imaging, suitable for hard X-ray applications with a resolution of 50 nm and below. The uniformity of the waveband plate is a key component of high phase contrast imaging.Soft X-Ray Indicator
X-rays below 5keV (<0.25nm) are typically classified as soft X-rays, which are more easily absorbed than high-energy X-rays. Usually, zone plates do not require the same thickness efficiency and allow for higher resolution imaging. A range of band plate options for soft/fine X-rays can meet specific requirements.
| Device | Outer Zone Width ΔRn(nm) | Thickness (µm) | Outer Diameter (µm) | (# of zones) E/ΔE Limit | ~ Focal Length (µm) | Estimated Lead Time |
|---|---|---|---|---|---|---|
| NZP-50um-12nm | 12 | 0.05 + 0.01 | 50 | 1059 | 144 | Please Contact |
| NZP-65um-15nm | 15 | 65 | 1096 | 235 | ||
| SZP‑90um‑15nm | 15 | <0.1 | 90 | 1514 | 325 | 2-3 |
| SZP‑120um‑15nm | 120 | 2019 | 433 | |||
| SZP‑200um‑18nm | 18 | <0.15 | 200 | 2797 | 868 | In Stock |
| SZP‑270um‑18nm | 270 | 3775 | 1172 | |||
| SZP‑320um‑18nm | 320 | 4473 | 1389 | |||
| SZP-200um-25nm | 25 | <0.24 | 200 | 2007 | 1207 | In Stock |
| SZP‑250um‑25nm | 250 | 2509 | 1510 | |||
| SZP-300um-25nm | 300 | 3010 | 1811 | |||
| SZP-360um-25nm | 360 | 3612 | 2173 | |||
| TZP‑160um‑50nm | 50 | <0.75 | 160 | 801 | 1934 | 2 – 3 |
| TZP‑280um‑50nm | 280 | 1401 | 3384 | |||
| TZP‑750um‑200nm | 200 | <0.75 | 750 | 938 | 36292 | 1 – 3 |
| TZP‑1250um‑200nm | 1250 | 1563 | 60487 | |||
| *For estimated efficiency of zone plate, please see generated graphs below or download our zone plate software. | ||||||
Hard X-Ray Indicator
X-rays above 5-10 keV transition from weak to hard X-rays, where they can better penetrate the sample to provide better imaging. Hard X-ray Fresnel zone plates require high aspect ratio functionality to provide sufficient efficiency and resolution for energies above 5 keV. Our current optical system can provide ultra-high resolution for sub 25 nm to 100 nm imaging based on the required energy. Stacking hard X-rays (through dual processing or chip alignment) can significantly improve the efficiency of our equipment. The range of options for hard X-ray band plates can be used for specific requirements.
| Device | Outer Zone Width ΔRn(nm) | Thickness (µm) | Outer Diameter (µm) | (# of zones) E/ΔE Limit | Energy Range (keV) | Estimated Lead Time (months) |
|---|---|---|---|---|---|---|
| HZP-50-25nm | 25 | >0.65 | 50 | 500 | 1.5 to 10 | 2 – 3 |
| HZP-75-25nm | 75 | 750 | 2 – 3 | |||
| HZP‑100um‑42.5nm | 42.5 | >0.8 | 100 | 588 | 2 to 12 | 2 – 3 |
| HZP‑85um‑50nm | 50 | >0.9 | 85 | 425 | 2 to 12 | 2 – 3 |
| HZPX‑85um‑50nm | >1.7 | 5.5 to 20 | 4 – 6 | |||
| HZP‑180um‑50nm | >0.9 | 180 | 900 | 2 to 12 | 2 – 3 | |
| HZP‑550um‑50nm | >0.9 | 550 | 2750 | 2 to 12 | 2 – 3 | |
| HZPX‑550um‑50nm | >1.5 | 5.5 to 20 | 4 – 6 | |||
| HZP-400um-100nm | 100 | >1.2 | 400 | 1000 | 2.5 to 8 | 2 – 3 |
| HZPX‑400um‑100nm | >2.6 | 8 to 30 | 4 – 6 | |||
| HZP‑400um‑120nm | 120 | >1.5 | 400 | 834 | 5 to 25 | 2 – 3 |
| HZPX‑400um‑120nm | >2.6 | 8 to 30 | 4 – 5 | |||
| HZP‑750um‑200nm | 200 | >2.2 | 750 | 938 | 7 to 20 | 3 – 4 |
| HZPX‑750um‑200nm | 200 | >3.6 | 12 to 50 | 4 – 5 | ||
| *For estimated efficiency of zone plate, please see generated graphs below or download our zone plate software. All zone plate diameters can be customized for specific setups. Standard frame sizes are 3 mm x 3 mm with SiN membranes (100 nm). | ||||||
Oxide Interlock process for Hard X-Ray Optics
Zone plate efficiency for binary zone plates requires high aspect ratio structures which can survive high flux imaging systems. The “Oxide Interlock” option creates small interconnecting channels between metal zone of silicon dioxide which is transparent to hard X-rays and does not swell or distort, even when not under vacuum. These have been shown to significantly increase the zone plate efficiency and lifetime.
Oxide Interlock process with silicon dioxide links between the gold zones, improving performance and lifetime of the zone plate optics. This comes standard on all hard X-ray optics. The silicon dioxide is highly transparent for hard X-rays.Central aperture
The options of central aperture and outer aperture can significantly improve the imaging of the waveband plate, reduce the zero secondary of the optical device, and increase its service life. Various chips with a thickness of up to 3 μ m or greater than 10 μ m can be used as separate chips. High resolution 18 nm outer region Fresnel zone plate top electroplated with 4 μ m thick center stop point
4 um thick central stop electroplated on top of Fresnel zone plate with high resolution 18 nm outer zonesCustom Designs and Frame Size
Custom designs and frame sizes can be developed for specific applications. We are able to fabricate devices down to 0.1 mm and below. Our standard frame sizes are 5 mm x 5 mm and membrane thickness can be down to 50 nm while the 100 nm thickness is ideal for energies above 5 keV. We also offer silicon carbide membranes for those requiring long-lifetime membranes.
Custom silicon nitride, silicon carbide or silicon membranes down to 0.9 mm half dimensions. Image above showing 1 cm x 1 cm (top), 5 mm x 5 mm (bottom left) and 0.9 mm x 5 mm chips.XY Stage for Zone Plates/Central Stop Alignment
Our custom XY stage allows micro-scale alignment of a central stop and zone plate and also allows for a possible blast-shield to be mounted.XY micrometer scale stage holder for central stop and zone plate alignment with blast shield
Waveband plate calculator
Applied Nanotools offers a free online zone plate calculating theoretical efficiencies and for calculating Fresnel zone plates parameters. Please see this link to visit the webpage: Zone Plate Calculator. For the legacy software please download here (note, this version is being replaced with the new website version).
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