High vacuum atomic force microscope for fault analysis and sensitive material research

Conducting nanoscale measurements in high vacuum environments can significantly improve the sensitivity and resolution of data, and enhance material analysis capabilities. Because high vacuum scanning environments have more accurate and stable repeatability data compared to nitrogen N2 or dry environmental conditions, users can measure different doping concentrations and feedback signals in applications such as semiconductor materials and fault analysis.

Performing scanning diffusion resistance microscopy measurements under high vacuum conditions can reduce the required needle sample interaction force, thereby significantly reducing damage to the sample and needle tip. This can extend the service life of each needle tip, make scanning more cost-effective and convenient, and obtain more accurate results by improving spatial resolution and signal-to-noise ratio. Therefore, using NX Hivac for high vacuum scanning diffusion resistance microscopy measurement can be considered a wise choice for fault analysis engineers to increase their throughput, reduce costs, and improve accuracy.

Park Hivac Manager

NX Hivac vacuum automatic control

Hivac Manager achieves high vacuum by logically and visually controlling the optimal vacuum conditions for pumping and exhausting processes with just one click. Each process is visually monitored through color and graphic changes, and with just one click, you don't have to worry about the vacuum operation sequence. Faster and simpler vacuum control software makes the use of atomic force microscopy more convenient and efficient.

Advanced automation features

NX Hivac has a wide range of features to minimize user input. In other words, you can scan faster and increase laboratory productivity.

StepScan automated scanning with electronic control stage

StepScan allows users to program devices for fast and convenient multi area imaging. NX Hivac allows you to complete sample scanning in just five steps: scanning, lifting the cantilever, moving the electric platform to a user-defined coordinate area, needle insertion, and repeated scanning. This can greatly improve productivity and minimize user input.

Electric laser alignment

Park electric laser alignment allows users to seamlessly connect automated measurement routines without the need for input. With our advanced pre collimated cantilever frame, the laser is aligned with the cantilever when replacing the probe. Simply adjust the positioning knob to freely position the laser spot on the X and Y axes, achieving the optimal position.

Improve accuracy and productivity

NX Hivac is the world's most accurate high-performance atomic force microscope, and also one of the simplest and most convenient atomic force microscopes for fault analysis. Park NX Hivac can help you improve your productivity and ensure reliable results.

Closed loop XY and Z-axis scanners

By using two independent closed-loop XY and Z-axis deflection scanners, you can be confident in the high accuracy of scanning. NX Hivac provides low residual bending planar and orthogonal XY axis scanning, resulting in an out of plane motion distance of less than 1 nm throughout the entire scanning range. In addition, NX Hivac features a high-speed Z-axis scanner with a non-linear scanning range of less than 0.5% and a scanning range of 15 μ m, which allows for accurate two-dimensional and three-dimensional measurements without the need for software post-processing.

Low noise XYZ axis position sensor

NX Hivac has the industry-leading low-noise Z-axis detector function of Park atomic force microscopy, which can accurately measure sample morphology. At the same time, low-noise XY axis closed-loop scanning reduces the front and rear scanning gap to 0.15% of the scanning range.

24 digit electronic controller

One of the major features of NX Hivac is that the NX series electronic controller can minimize time waste and maximize accuracy. Our controller is a fully digital, 24 bit high-speed device that allows users to perform a series of scans, including our True Non Contact mode. The controller has a low-noise design and high-speed processing components, making it an excellent choice for precision voltage and current measurement and nanoscale imaging. Embedded electronic products also have digital signal processing characteristics, allowing users to easily analyze measurement values and imaging.

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