Micro scale Spatial Resolution LIBS Testing System - MEEPLIBS
MEEPLIBS can perform spatially resolved elemental analysis at the micrometer scale, achieving * integration with traditional microscopes. The standard analysis aperture sizes are 15 microns and 18 microns (the smallest can reach 4 microns), and can be tested in ambient temperatures or specific environments.
Widely used for real-time elemental analysis of micro scale spatial resolution in semiconductor materials and panel materials.
System features:
Light source: 266nm ultraviolet laser light source
Laser beam shaping function with attenuator and adjustable laser power software
Can achieve automatic temperature control of the detection system
Configure cameras in the system, allowing users to observe the sample area being tested in real-time
Configure an electric 3D adjustment table to calibrate the laser focusing position, improve experimental repeatability accuracy, and perform sequential measurements on samples
Capable of analyzing and measuring all elements, including those with the lightest weight
No need for sample pretreatment, fast detection