TS3000-SE Probe System

S3000-SE is an upgraded development of the TS3000 probe station system, which is equipped with MPI ShielDEnvironment ™， It can achieve ultra-low noise, meet the requirements of device characterization, wafer level reliability, and various applications such as RF and mmW. Advantages:

• Suitable for various wafer measurement applications
• Module Measurement - DC-IV, DC-CV, Pulse-IV, ESD, 1/f，RTS
• RF and Millimeter Wave -26 GHz to 110 GHz and above
• Reliability testing - precise stress testing
• MPI ShielDEnvironment ™ Shielding environment
• A precision measurement environment designed specifically for EMI/RFI/Light tight shielding to achieve optimal 1/f ultra-low noise test results
• Support fA level ultra-low noise IV measurement
• A precision measurement environment designed specifically for EMI/RFI/Light Time shielding
• Programmable microscope slide for easy automation operation
• Temperature measurement range -60 ° C to 300 ° C

ShielDEnvironment ™

MPI ShielDEnvironment ™ It is a high-performance micro dark room shielding system that provides excellent EMI and opaque shielding testing environment for ultra-low noise and low capacitance measurements.

ShielDCap ™

MPI ShielDEnvironment ™ Allow multiple test combinations such as RF with up to 4 ports or DC/Kelvin or high power with up to 8 ports.

Probe hover control

MPI probe hover control PHC ™ Allow easy manual control of the contact and separation between the probe and the chip. The separation distance can be precisely controlled through micrometer feedback to achieve precise positioning of the probe to the wafer.

Quick wafer loading

The dual front door channels and unique chuck design enable quick replacement of 150, 200, and 300mm wafers, as well as small components. Two ceramic specific RF calibration AUX chucks are located at the front for easy loading and unloading.

Integrated hardware control panel

The intelligent hardware control panel is fully integrated into the probe system and designed based on decades of experience and customer interaction. The hidden keyboard and mouse enhance the overall aesthetics.

temperature control

MPI and ERS jointly designed a new 300 mm hot card tray AirCool ® The PRIME series has unparalleled thermal flexibility, reducing temperature change time by 60%, reducing conversion time, improving electrical performance, making testing easier in inert gas atmospheres, and on-site upgradability is AirCool ® The added value of PRIME hot card disk system. The convenient touch screen displays the chuck temperature in real-time, located in a convenient position in front of the operator for quick operation and instant feedback.

ERS' unique AC3 cooling technology

The entire range of probe station systems under MPI adopts ERS' unique AC3 cooling technology and self-management system, which can use recycled cooling air to blow MPI ShielDEnvironment ™， Compared to other systems on the market, it can significantly reduce air consumption by 30% to 50%.

Security Test Management (STM) System

The unique STM system can prevent the front door from being opened during the testing process to ensure the safety of the testing process, and no system door can be opened under any circumstances. The unique intelligent dew point control program can avoid accumulation during cold testing, and the system automatically monitors the flow of CDA or nitrogen. If the traffic is interrupted or insufficient, STM ™ It will automatically switch the chuck to safe mode and quickly heat the chuck above the dew point. MPI STM ™ The function of TS3000-SE is to ensure a safe, reliable, and convenient measurement environment by maintaining a secure testing environment

Instrument integration

The optional instrument rack can shorten cable length and improve measurement dynamics and directionality in RF and mmW applications.

Software Suite SENTIO ®

The MPI automatic engineering probe system is controlled by a unique and revolutionary multi touch operation SENTIO ® The software suite, with its simple and intuitive operation, saves a lot of training time. The commands of 'scroll', 'zoom', and 'move' mimic modern smart mobile devices, allowing everyone to become an expert in just a few minutes. Switching between the active application and other apps only requires simple finger operations.