
TS150-AIT & TS200-THZ
The TS150-AIT and TS200-THZ probe systems are designed specifically for emerging THz applications, such as high-speed 5G communication, satellites, non-invasive spectroscopy, healthcare equipment, and short-range automotive radar, by adding active impedance tuner integration on the same probe station. These two systems are the industry's first clearly designed 150mm and 200mm probe systems that can combine the requirements of millimeter wave, terahertz (THz), and automatic impedance tuner applications to provide accurate testing with optimal measurement directionality.
- Seamless integration of any bandwidth up to 1.5 THz, differential or broadband spreaders, and/or automatic impedance tuners;
- The innovative design of the expander/tuner integration enables maximum measurement dynamics;
- Maximum mechanical stability and repeatability, combined with convenient and safe operation.
TS150-AIT&TS200-THZ Details Advantage
The MPI TS200-THZ manual probe system has unparalleled functionality. These highly repeatable (1 µ m) pressure plate lifting designs have three offline positions for safety, contact, separation (300 µ m), and loading (3mm). These features can prevent accidental probe or wafer damage, while providing intuitive control, accurate contact positioning, and safety settings. Additional Probe Hover Control ™ With a hovering height of 50, 100, or 150 µ m, it is easy and convenient to align the probe with the solder pad.

Characteristics and advantages
Air floating mobile system
MPI's unique air cushion stage design features a simple one handed calibrator control, providing unparalleled operational convenience for fast XY navigation and wafer loading. Paired with a precision 25x25mm XY Theta micrometer movement, it does not affect precise positioning capabilities.

Chuck Z adjustment
The TS150-THZ has a fine chuck Z adjustment of 10mm, designed to flexibly integrate different spreaders such as Rohde&Schwarz, VDI, or OML. It is very advantageous for setting up multiple bending solutions on the same probe system, as it can be easily and quickly done.

Micro locator
The dedicated extremely rigid probe platform design can accommodate two bold east-west directions - the downward MP80 large-area micro locator configured in east-west direction. By using two north-south "bridges" as standard configuration, it is easy to perform four port RF measurement or DC bias.

MP80-DX
Another pioneering MPI solution on the market - the unique MP80-DX, with a simple and precise accuracy as low as 1 µ m, is the ideal choice for precise and cost-effective multi line TRL, i.e. multi line TRL - the only RF calibration method in the millimeter wave and sub terahertz ranges. For more detailed information, please visit MPI QAlibria ® Software.

Multiple chuck options
TS200-THZ offers a variety of chuck options to meet different budget and application requirements, such as MPI: standard RF chuck with BNC connector; Specialized mmW chuck, fully embedded with special ceramics with high thermal conductivity (>180 W/Km); Even the ERS AirCool RF chuck (from 20 ° C to 200 ° C or higher) comes with an integrated gold-plated top surface and small vacuum holes. All chucks have two auxiliary chucks made of ceramic material for precise RF calibration, especially in the range above 40 GHz.

Multiple optical options
We provide dedicated MPI optical components, which can be selected from single tube MPI SuperZoom SZ10 or MegaZoom MZ12, with an optical zoom of up to 12 times and a working distance of over 45 millimeters. Due to the inherent space limitations of integrated spreaders, it is required to have the shortest distance from the DUT. Therefore, this microscope has a small size and is very suitable for RF and mmW applications.

Spread spectrum integration
The TS200-THZ integrates a brand new spread spectrum integrated design. In order to minimize the distance to the DUT and provide optimal measurement directionality, MPI introduces a novel concept of hovering the extender over the entire 200mm wafer. The additional key function of the new TS200-THZ probe station is easy, convenient, and fast reconfiguration.
