Applicable standards:
GB/T 8980-1996 "High Purity Nitrogen"
GB/T 14599-93 "High Purity Oxygen"
GB/T 4844.3-1995 "High Purity Helium"
GB/T 4842-2006 "High Purity Argon"
GB/T 7445-1995 "Pure Hydrogen, High Purity Hydrogen, Ultra Pure Hydrogen"
GB/T 17873-1999 "Pure Neon"
The purity indicators for various gases specified in the national standard:
Gas type project indicators
Excellent product, first-class product, qualified product
High purity nitrogen with a purity of 0-2 (V/V) ≥ 99.9996999.999399.999
Oxygen content, 10-6 (V/V) ≤ 1.02.03.0
Hydrogen content, 10-6 (V/V) ≤ 0.51.01.0
Total content of CO, CO2, CH4, 10-6 (V/V) ≤ 1.02.03.0
High purity argon purity, 10-2(V/V) ≥99.999699.999399.999
Nitrogen content, 10-6 (V/V) ≤ 245
Hydrogen content, 10-6 (V/V) ≤ 0.511
Total carbon content (calculated as methane) 10-6 (V/V) ≤ 0.512
High purity helium gas purity, 10-2(V/V) ≥99.999699.999399.999
Hydrogen content, 10-6 (V/V) ≤ 0.10.51
Oxygen (argon) content 10-6 (V/V) ≤ 0.511
Nitrogen content, 10-6 (V/V) ≤ 112
Carbon monoxide content, 10-6 (V/V) ≤ 0.10.20.5
Carbon dioxide content, 10-6 (V/V) ≤ 0.20.20.5
Methane content, 10-6 (V/V) ≤ 0.10.20.5
High purity hydrogen purity, 10-2(V/V) ≥99.999
Oxygen (argon) content 10-6 (V/V) ≤ 1
Nitrogen content, 10-6 (V/V) ≤ 5
Carbon monoxide content, 10-6 (V/V) ≤ 1
Carbon dioxide content, 10-6 (V/V) ≤ 1
Methane content, 10-6 (V/V) ≤ 1
Ultra pure hydrogen purity, 10-2(V/V) ≥99.9999
Oxygen (argon) content 10-6 (V/V) ≤ 0.2
Nitrogen content, 10-6 (V/V) ≤ 0.4
Carbon monoxide content, 10-6 (V/V) ≤ 0.1
Carbon dioxide content, 10-6 (V/V) ≤ 0.1
Methane content, 10-6 (V/V) ≤ 0.2
High purity oxygen purity, 10-2(V/V) ≥99.99999.99899.995
Argon content, 10-6 (V/V) ≤ 2510
Nitrogen content, 10-6 (V/V) ≤ 51020
Carbon dioxide content, 10-6 (V/V) ≤ 0.511
Total carbon content (calculated as methane) 10-6 (V/V) ≤ 0.512
GB/T 5829-1995 "Krypton"
GB/T 5828-1995 Xenon gas
HG/T 3633-1999 "Pure Methane"
GB/T 10621-2006 "Food Additives - Liquid Carbon Dioxide"
GB/T 16942-1997 "Gas Hydrogen for Electronic Industry"
GB/T 16943-1997 "Helium Gas for Electronic Industry"
GB/T 16944-1997 "Gas Nitrogen for Electronic Industry"
GB/T 16945-1997 "Gas Argon for Electronic Industry"
GB/T 14604-93 "Gas Oxygen for Electronic Industry"
GB/T 14600-93 "Gases for Electronic Industry - Argon Nitrogen Oxide"
GB/T 14601-93 "Gas high-purity ammonia for electronic industry"
GB/T 14602-93 "Hydrogen Chloride Gas for Electronic Industry"
GB/T 14603-93
GB/T 18994-2003 "Gases for Electronic Industry - High Purity Chlorine"
GB/T 14851-93 "Gas Phosphine for Electronic Industry"
GB/T 17874-1999 "Gases for electronic industry - Boron trichloride"
GB/T 15909-1995 "Gas Silane for Electronic Industry"