Dektak XTL ™ Probe based profilometer can accommodate samples up to 350mm x 350mm, bringing Dektak to large wafer and panel manufacturing ® The repeatability of legends. Dektak XTL features air vibration isolation design and fully enclosed workstation design, with easy-to-use interlocking doors, making it an ideal choice for today's demanding production workshop environments. Its dual camera architecture enhances spatial perception capabilities, and its high level of automation maximizes testing throughput.

Industry's best automation and analysis software

The enhanced software features make Dektak XTL the most powerful and easy-to-use probe based profilometer. The system utilizes Vision64 software to achieve numerous measurement sites, 3D imaging, and highly customized feature analysis through hundreds of built-in analysis tools. Vision64 software can also measure shapes, such as curvature radius. Pattern recognition can greatly reduce operator errors and improve measurement position accuracy. Integrated software packages combine data collection and analysis with intuitive workflows.

****Probe technology

Dektak XTL is based on over 50 years of expertise in probe based profilometers and customized applications for production facilities to meet today's and tomorrow's strict industry roadmaps. The 300mm high-precision coding XY sample stage provides manufacturers with reliable tools that meet strict metrological research and development requirements. Dektak's dual camera control and high-definition zoom dual field camera provide enhanced spatial perception. The click positioning in real-time video enables operators to quickly move samples to the correct position for easy measurement setup and automated programming. The large interlocking doors of the system provide safe and convenient access for sample loading/unloading.

Other hardware features include:

• Single arch architecture and integrated vibration isolation system achieve superior performance in the industry
  
• Quickly replace self aligning probes
• High precision coding XY sample stage for faster automatic data collection

• N-Lite has low power and adopts soft touch technology, with a measurement range of 1mm, which can be used to measure both precision and high vertical range samples simultaneously.