brief introduction

Cathodoluminescence system（Cathodoluminescence (CL) is usually configured in scanning electron microscopy or transmission electron microscopy, which can achieve the combination of morphology observation, structure and composition analysis with cathodoluminescence spectroscopy, and realize full spectrum fluorescence scanning imaging. The electron beam spot used for cathodoluminescence excitation is very small and has high energy; Compared with photoluminescence (PL) cathodoluminescence, it has the characteristics of high spatial resolution, high excitation energy, wide spectral range, and large excitation depth, and can achieve full spectrum fluorescence scanning imaging. The combination of cathodoluminescence system and scanning electron microscope can achieve morphology observation, structure and composition analysis of semiconductor materials and devices, fluorescent materials (geological, archaeological materials), etc. at a small scale, and the combination of cathodoluminescence spectroscopy has been widely applied in the fields of semiconductor, microelectronics, materials, physics, geology, archaeology, etc. Especially in the research field of the luminescence properties and electronic structure of fluorescent substances such as semiconductor quantum dots and quantum wires at the micrometer and nanometer scales, cathodoluminescence technology has important application value.