Product Introduction

Room temperature catalytic gas purification system

Specially designed for bulk gas purification, we can provide you with the lowest cost and high-quality gas purification solution. It has the advantages of compact structure, low-cost operation, and high reliability, and can effectively purify bulk gases containing various impurities to achieve ultra purity gas requirements, while also having minimal pressure drop and excellent continuous working ability. The entire system adopts a modular design, which has a wide range of applications and can be used in various fields and sites with different size requirements.

Product performance

Suitable for use with raw gas with a purity of not less than 99.99%

This product has a dual structure, with one set for operation and the other set for regeneration and backup

After gas purification, the content of various impurities such as water and oxygen is less than 10 ppb

◎ Electrochemical polishing 316 (L) stainless steel ◎ Built in high-efficiency filter

◎ Optimal processing cycle design, large adsorbent loading capacity, and extended service life

◎ This product features an overall modular design, compact layout, and small footprint

Product application

◎ Protection gas purification: Steel, petrochemical, and machinery industries

◎ Primary purification of gases required for the electronic industry, including high-purity monocrystalline silicon, wafer epitaxy, large-scale integrated circuits, and optoelectronic product production.

◎ Semiconductor process equipment: CVD, MOCVD, HVPE, diffusion furnace, etc

◎ Bulk gas purification

system parameter