Desktop plasma cleaning and etching system, plasma etching&Reactive ion etching system

Chamber structure:

Model comparison:

Application:

·EtchingOxide etchingRIEMode, nitride etchingRIEMode, silicon etchingRIEMode, photoresist etchingRIEPattern, polymer（RIE+PE）Two dimensional materialsRIE

·Surface TreatmentHydrophilic treatmentPEMode, functionalizationPEMode, enhanced adhesion:PE+RIEPolymer: RIE+PE