VIP member
1200 ℃ integrated automatic small PECVD system
The PECVD system uses radio frequency to ionize a gas containing atoms composed of thin films, forming a plasma locally. The plasma has strong chemica
Product details
application
PECVDThe system uses radio frequency to ionize a gas containing atoms composed of thin films, forming a plasma locally. The plasma has strong chemical activity and is easily reactive, depositing the desired thin film on the substrate.
PECVDSystem configuration;
1.1200Open sliding single temperature zone vacuum tube furnace
2.Plasma RF power supply
3.Multi channel quality flow control system
4.Vacuum system (purchased separately)
Product characteristics;
Wide power range; Wide temperature range; The sputtering area is long; Adjustable whole tube; Exquisite and compact, with high cost-effectiveness, it can achieve rapid temperature rise and fall, making it an ideal choice for laboratory growth of thin films such as graphene, metal films, ceramic films, composite films, etc. It can also be used for extended plasma cleaning and etching.
|
System name |
IntegratedPECVDsystem |
1200℃ SmallPECVDsystem |
|
system model |
PECVD-12IH-500A |
PECVD-12IH-4Z/G |
|
control mode |
LCD screen microPLCcontrol system |
hand movement |
|
maximum temperature |
1200℃ |
|
|
Heating zone length |
200mm |
|
|
Length of constant temperature zone |
100mm |
|
|
temperature range |
Single temperature zone |
|
|
Quartz tube diameter |
Φ60mm |
Φ50mm |
|
rated power |
1.2Kw |
2Kw |
|
rated voltage |
220V |
|
|
Sliding method and distance |
Automatic sliding;200mm |
Manual sliding;200mm |
|
temperature control |
30Segment program temperature control |
50Segment program temperature control |
|
Control accuracy |
±1℃ |
|
|
Maximum operating temperature of furnace tube |
＜1200℃ |
|
|
Gas path flange |
Adopting multi ring sealing technology for quick connection of clamps |
|
|
Exhaust cooling device |
Advanced air insulation technology, combined with thermal induction technology, when the surface temperature of the furnace rises to50At ℃, The exhaust fan will automatically start, rapidly cooling the surface of the furnace. |
|
|
Gas control method |
Mass flow meter (button type) |
|
|
Number of gas paths |
2Road（2-4Road) |
4Road (the number of air paths can be selected according to specific needs) |
|
Flow range |
0-500sccm(Standard milliliters/Nitrogen calibration (optional) |
|
|
accuracy |
±1%F.S |
|
|
response time |
1sec |
|
|
Working temperature (flow meter) |
20-120℃ |
|
|
Working pressure |
intake pressure0.05-0.3Mpa(Pressure gauge) |
|
|
Air Intake method |
Adopting anti backflow design |
|
|
specifications |
Medium vacuum (please purchase separately for integrated type) |
|
|
System vacuum range |
10Pa-100Pa |
|
|
vacuum pump |
Theoretical limit vacuum degree of two-stage mechanical pump3x10-1PaExtraction rate4L/S(Optional: Other Speed Vacuum Pumps),The air outlet is equipped with an oil filter and rated voltage220V, Power0.55Kw |
|
|
signal frequency |
13.56MHz±0.005% |
|
|
Power output range |
0W-500W |
0W-100W |
|
Maximum reflected power |
350W |
30W |
|
RF output interface |
50Ω，N-type,temale |
|
|
power stability |
±0.1% |
|
|
Harmonic component |
≤-50dbc |
|
|
Supply Voltage |
Single-phase AC（187V-253V)frequency50/60HZ |
|
|
Whole machine power |
≥70% |
|
|
screen display |
Positive power, matching capacitor capacitor position, bias voltage value |
|
|
External dimensions of furnace body |
290×350×340mm |
290×350×495mm |
|
System external dimensions |
420×1440×1100mm |
530×2310×750mm |
|
Total weight of the system |
270Kg |
|
Online inquiry
-
Contacts
-
Company
-
Telephone
-
Email
-
WeChat
-
Verification Code
-
Message Content
-