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1200 ℃ Double Tube Sliding Single and Multi Temperature Zone CVD System
Product Usage: This CVD system is specifically designed for growing thin films on metal foils, especially for research on flexible metal foil electrod
Product details
Product Usage:
This CVD system is specifically designed for growing thin films on metal foils, especially for the application of flexible metal foils in the new generation of energy
Research on electrodes achieves rapid heating and cooling through sliding furnaces.
Product composition:
CVD system configuration:
1. 1200 degree open vacuum tube furnace (optional single temperature zone and dual temperature zone).
2. The sliding system is divided into manual and electric sliding, and is equipped with an air-cooled system.
3. The inner and outer quartz tubes are connected with vacuum permeable atmosphere double flanges.
4. Multi channel gas flow control system (proton flow controller and float flow controller)
5. Vacuum system (optional with medium or high vacuum)
Product features:
Product uniqueness
The control circuit adopts fuzzy PID programming technology, which has high temperature control accuracy, small thermal inertia, no temperature surge, reliable performance, and simple operation.
The flange structure of the 2-way quick connection adopts our company's unique intellectual property patent design to improve operational convenience.
The three vacuum systems have automatic control functions for the upper and lower limits of vacuum degree. The high vacuum system uses a high-pressure, impact resistant molecular pump to prevent accidental air leakageCausing damage to the molecular pump and prolonging the service life of the system.
The 4 (electric) sliding system adopts a temperature controller to automatically control the movement of the furnace body. After the program is completed, the furnace body slides at the set speed due to the sliding limitFunction: The furnace body will not collide, and after the sample is exposed from the furnace body, it will be quickly cooled down through an air cooling system.
5 double tube vacuum sealed flanges, the reaction gas can react between the inner and outer tubes, and the cooling gas can pass through the inner tube, thereby reducing the temperature of the outer wall of the inner tube.
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System name |
1200 ℃ Double Tube Sliding Single/Multi Temperature Zone CVD System |
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system model |
CVD-12II6SH-3Z/G |
CVD-12III9SH-3Z/G |
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maximum temperature |
1200℃ |
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Heating zone length |
610mm |
940mm |
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Length of constant temperature zone |
400mm |
700mm |
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temperature range |
Dual temperature zone |
Three temperature zones |
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Quartz tube diameter |
Inner tube: Φ 80mm Outer tube: Φ100mm |
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rated power |
4.8Kw |
7.2Kw |
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rated voltage |
220V |
380V (three-phase) |
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Sliding Distance |
485mm |
650mm |
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Sliding method |
Manual sliding/automatic sliding (automatically controlled by temperature controller, when the program is completed, the furnace slides at the set speed) |
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temperature control |
Domestic program-controlled temperature control system with 50 segments of program-controlled temperature control; |
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Control accuracy |
±1℃ |
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Maximum operating temperature of furnace tube |
＜1200℃ |
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Double tube flange connection |
Adopting double flange and double clamp connection, it can expand multiple functions and independently control the vacuum and gas flow of the inner and outer pipes The connection between the sealing flange and the pipe fittings adopts multi ring sealing technology, forming a seal between the sealing flange and the outer wall of the pipe. The seal is still effective even in the case of large errors in the outer diameter of the pipe fittings. The installation of this sealing flange only needs to be done during the first use of the equipment |
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Gas control method |
Mass flowmeter |
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Number of gas paths |
3 channels (the number of air channels can be selected according to specific needs) |
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Flow range |
0-500sccm (standard milliliters/minute, optional) nitrogen calibration |
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accuracy |
±1%F.S |
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response time |
≤4sec |
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operation temperature |
5-45℃ |
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Working pressure |
Inlet pressure 0.05-0.3Mpa (gauge pressure) |
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System connection method |
Using KF quick connect bellows, high vacuum manual baffle valve, and digital vacuum measuring instrument |
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specifications |
high vacuum |
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System vacuum range |
1x10-3Pa-1x10-1Pa |
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vacuum pump |
Theoretical limit vacuum degree of vacuum molecular pump |
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External dimensions of furnace body |
480×770×605mm |
410×1100×605mm |
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System external dimensions |
530 × 1440 × 750mm (excluding high vacuum) |
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Total weight of the system |
340Kg |
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